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Electron-beam induced photoresist shrinkage influence on 2D profiles
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Electron-beam induced photoresist shrinkage influence on 2D profiles
Bunday B.
;
Cordes A.
;
Allgair J.
;
Aguilar D.B.
;
Tileli V.
;
Thiel B.
;
Avitan Y.
;
Peltinov R.
;
Bar-Zvi M.
;
Adan O.
;
Chirko K.
URI:
http://repositorio.udlap.mx/xmlui/handle/123456789/6567
Date:
2010
Abstract:
https://www.scopus.com/inward/record.uri?eid=2-s2.0-79956128673&doi=10.1117%2f12.846991&partnerID=40&md5=44449ad63b229cca8884c9bd0d507b97
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